LPCVD is crucial in catalysis for several reasons: 1. Controlled Film Thickness: LPCVD allows for precise control over the film thickness, which is essential for catalytic activity. 2. Uniformity: The low pressure ensures uniform deposition even on complex substrate geometries, enhancing the surface area available for catalytic reactions. 3. High Purity: LPCVD processes typically produce high-purity films, minimizing impurities that could poison catalytic sites.
