What are the typical applications of LPCVD in catalysis?
LPCVD is used in several catalytic applications, including: - Microelectromechanical Systems (MEMS): Thin films deposited via LPCVD are used in MEMS devices that have catalytic functionalities. - Fuel Cells: LPCVD can create thin-film catalysts for proton-exchange membrane fuel cells (PEMFCs). - Photocatalysis: Deposited films such as TiO2 are used in photocatalytic applications for environmental remediation.