film stress

How Can Film Stress be Mitigated?

Mitigating film stress involves several strategies:
Optimizing Deposition Parameters: Fine-tuning deposition conditions can help manage stress levels.
Thermal Annealing: Post-deposition thermal treatments can relieve stress.
Substrate Selection: Choosing substrates with compatible thermal expansion coefficients can minimize stress.

Frequently asked queries:

What is Film Stress?
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How Can Film Stress be Mitigated?
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