What Role Do Catalysts Play in Chemical Vapor Deposition (CVD)?
In CVD, catalysts enable the deposition of thin films on semiconductor wafers by accelerating the decomposition of precursor gases. For instance, metal-organic chemical vapor deposition (MOCVD) employs metal-organic compounds that decompose in the presence of a catalyst to form a thin film. This technique is widely used to produce materials like gallium nitride (GaN) and silicon carbide (SiC), which are essential for high-power and high-frequency electronic devices.
