What Are Some Examples of Catalysts Used in the Semiconductor Industry?
Various catalysts are employed in semiconductor manufacturing. Transition metals like platinum, palladium, and nickel are commonly used due to their excellent catalytic properties. For instance, platinum is often used in the catalytic decomposition of silane (SiH4) in CVD processes. Additionally, rare earth elements like cerium and lanthanum serve as catalysts in certain high-temperature reactions.
