Precision: EBL provides high-resolution patterning, allowing for the creation of features with nanometer precision. This precision is crucial for tailoring the active sites of catalysts. Flexibility: The technique is versatile and can be applied to various materials, including metals, semiconductors, and insulators. Customization: EBL allows for the design of complex and customized patterns that can optimize catalytic properties, such as activity, selectivity, and stability.