What are some typical materials deposited by ALD for catalytic applications?
ALD can be used to deposit a variety of materials that are important for catalytic applications. These include: - Metal oxides (e.g., alumina, titania, and zirconia) which serve as supports for active catalytic phases. - Noble metals (e.g., platinum, palladium, and gold) which are used for their high catalytic activity. - Transition metal nitrides (e.g., molybdenum nitride) which offer high stability and activity in harsh conditions. - Mixed oxides which can provide synergistic effects and improved catalytic performance.