ald processes

What are some typical materials deposited by ALD for catalytic applications?

ALD can be used to deposit a variety of materials that are important for catalytic applications. These include:
- Metal oxides (e.g., alumina, titania, and zirconia) which serve as supports for active catalytic phases.
- Noble metals (e.g., platinum, palladium, and gold) which are used for their high catalytic activity.
- Transition metal nitrides (e.g., molybdenum nitride) which offer high stability and activity in harsh conditions.
- Mixed oxides which can provide synergistic effects and improved catalytic performance.

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