How Does Catalysis Enhance Semiconductor Processes?
Catalysis improves the efficiency and selectivity of chemical processes used in semiconductor manufacturing. For instance, in the chemical vapor deposition (CVD) process, catalysts help in the deposition of thin films of materials like silicon dioxide or silicon nitride. These films are critical for insulating different layers of the semiconductor device. Catalysts also play a role in the plasma etching process, where they assist in the removal of specific material layers to create precise patterns.
