Diaphragm gauges function based on the principle of mechanical deformation. The diaphragm, often made from materials like stainless steel or silicon, bends in response to pressure changes. This deflection is then measured either capacitively or piezoelectrically. In capacitive diaphragm gauges, the change in capacitance between the diaphragm and a fixed electrode is measured. In piezoelectric gauges, the deformation generates a voltage due to the piezoelectric effect.
